JPH0474420U - - Google Patents
Info
- Publication number
- JPH0474420U JPH0474420U JP11770290U JP11770290U JPH0474420U JP H0474420 U JPH0474420 U JP H0474420U JP 11770290 U JP11770290 U JP 11770290U JP 11770290 U JP11770290 U JP 11770290U JP H0474420 U JPH0474420 U JP H0474420U
- Authority
- JP
- Japan
- Prior art keywords
- organic metal
- container
- supply device
- metal supply
- grown
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002184 metal Substances 0.000 claims description 5
- 238000000034 method Methods 0.000 claims 1
- 238000000197 pyrolysis Methods 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
- 239000010409 thin film Substances 0.000 claims 1
- 238000001947 vapour-phase growth Methods 0.000 claims 1
- 239000012159 carrier gas Substances 0.000 description 2
- 125000002524 organometallic group Chemical group 0.000 description 1
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11770290U JPH0474420U (en]) | 1990-11-13 | 1990-11-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11770290U JPH0474420U (en]) | 1990-11-13 | 1990-11-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0474420U true JPH0474420U (en]) | 1992-06-30 |
Family
ID=31865606
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11770290U Pending JPH0474420U (en]) | 1990-11-13 | 1990-11-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0474420U (en]) |
-
1990
- 1990-11-13 JP JP11770290U patent/JPH0474420U/ja active Pending
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